6/17/2011	10:22:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2011	10:22:32 AM	Recipe started at 10:22 AM
6/17/2011	10:22:32 AM	H2 valve closed
6/17/2011	10:22:32 AM	BCl3 valve closed
6/17/2011	10:22:32 AM	PH3 valve closed
6/17/2011	10:22:32 AM	SiCl4 pre valve closed
6/17/2011	10:22:32 AM	SiCl4 post valve closed
6/17/2011	10:22:32 AM	Main Vac valve closed
6/17/2011	10:22:32 AM	Bypass valve closed
6/17/2011	10:22:32 AM	Bubbler valve closed
6/17/2011	10:22:32 AM	Helium valve opened
6/17/2011	10:22:32 AM	Helium MFC set to  500.000000
6/17/2011	10:22:32 AM	H2 MFC set to  0.000000
6/17/2011	10:22:32 AM	BCl3 MFC set to  0.000000
6/17/2011	10:22:32 AM	PHl3 MFC set to  0.000000
6/17/2011	10:22:32 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:22:32 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:22:32 AM	Tube furnace set to 0
6/17/2011	10:23:52 AM	Helium valve closed
6/17/2011	10:23:52 AM	H2 valve closed
6/17/2011	10:23:52 AM	BCl3 valve closed
6/17/2011	10:23:52 AM	PH3 valve closed
6/17/2011	10:23:52 AM	SiCl4 pre valve closed
6/17/2011	10:23:52 AM	SiCl4 post valve closed
6/17/2011	10:23:52 AM	Main Vac valve closed
6/17/2011	10:23:52 AM	Bypass valve closed
6/17/2011	10:23:52 AM	Bubbler valve closed
6/17/2011	10:23:52 AM	Helium MFC set to  0.000000
6/17/2011	10:23:52 AM	H2 MFC set to  0.000000
6/17/2011	10:23:52 AM	BCl3 MFC set to  0.000000
6/17/2011	10:23:52 AM	PHl3 MFC set to  0.000000
6/17/2011	10:23:52 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:23:52 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:23:52 AM	Tube furnace set to 0
6/17/2011	10:23:52 AM	Run finished at 10:23 AM
6/17/2011	10:23:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2011	10:29:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2011	10:29:41 AM	Recipe started at 10:29 AM
6/17/2011	10:29:41 AM	Helium valve closed
6/17/2011	10:29:41 AM	H2 valve closed
6/17/2011	10:29:41 AM	BCl3 valve closed
6/17/2011	10:29:41 AM	PH3 valve closed
6/17/2011	10:29:41 AM	SiCl4 pre valve closed
6/17/2011	10:29:41 AM	SiCl4 post valve closed
6/17/2011	10:29:41 AM	Main Vac valve closed
6/17/2011	10:29:41 AM	Bubbler valve closed
6/17/2011	10:29:41 AM	Bypass valve opened
6/17/2011	10:29:41 AM	Helium MFC set to  0.000000
6/17/2011	10:29:41 AM	H2 MFC set to  0.000000
6/17/2011	10:29:41 AM	BCl3 MFC set to  0.000000
6/17/2011	10:29:41 AM	PHl3 MFC set to  0.000000
6/17/2011	10:29:41 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:29:41 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:29:41 AM	Tube furnace set to 0
6/17/2011	10:30:13 AM	Helium valve closed
6/17/2011	10:30:13 AM	H2 valve closed
6/17/2011	10:30:13 AM	BCl3 valve closed
6/17/2011	10:30:13 AM	PH3 valve closed
6/17/2011	10:30:13 AM	SiCl4 pre valve closed
6/17/2011	10:30:13 AM	SiCl4 post valve closed
6/17/2011	10:30:13 AM	Bubbler valve closed
6/17/2011	10:30:13 AM	Main Vac valve opened
6/17/2011	10:30:13 AM	Bypass valve opened
6/17/2011	10:30:13 AM	Helium MFC set to  0.000000
6/17/2011	10:30:13 AM	H2 MFC set to  0.000000
6/17/2011	10:30:13 AM	BCl3 MFC set to  0.000000
6/17/2011	10:30:13 AM	PHl3 MFC set to  0.000000
6/17/2011	10:30:13 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:30:13 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:30:13 AM	Tube furnace set to 0
6/17/2011	10:30:13 AM	Run finished at 10:30 AM
6/17/2011	10:30:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2011	10:33:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/17/2011	10:33:56 AM	Recipe started at 10:33 AM
6/17/2011	10:33:56 AM	Helium valve closed
6/17/2011	10:33:56 AM	H2 valve closed
6/17/2011	10:33:56 AM	BCl3 valve closed
6/17/2011	10:33:56 AM	PH3 valve closed
6/17/2011	10:33:56 AM	SiCl4 pre valve closed
6/17/2011	10:33:56 AM	SiCl4 post valve closed
6/17/2011	10:33:56 AM	Main Vac valve closed
6/17/2011	10:33:56 AM	Bubbler valve closed
6/17/2011	10:33:56 AM	Bypass valve opened
6/17/2011	10:33:56 AM	Helium MFC set to  0.000000
6/17/2011	10:33:56 AM	H2 MFC set to  0.000000
6/17/2011	10:33:56 AM	BCl3 MFC set to  0.000000
6/17/2011	10:33:56 AM	PHl3 MFC set to  0.000000
6/17/2011	10:33:56 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:33:56 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:33:56 AM	Tube furnace set to 0
6/17/2011	10:33:56 AM	Helium valve closed
6/17/2011	10:33:56 AM	H2 valve closed
6/17/2011	10:33:56 AM	BCl3 valve closed
6/17/2011	10:33:56 AM	PH3 valve closed
6/17/2011	10:33:56 AM	SiCl4 pre valve closed
6/17/2011	10:33:56 AM	SiCl4 post valve closed
6/17/2011	10:33:56 AM	Bubbler valve closed
6/17/2011	10:33:56 AM	Main Vac valve opened
6/17/2011	10:33:56 AM	Bypass valve opened
6/17/2011	10:33:56 AM	Helium MFC set to  0.000000
6/17/2011	10:33:56 AM	H2 MFC set to  0.000000
6/17/2011	10:33:56 AM	BCl3 MFC set to  0.000000
6/17/2011	10:33:56 AM	PHl3 MFC set to  0.000000
6/17/2011	10:33:56 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:33:56 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:33:57 AM	Tube furnace set to 0
6/17/2011	10:34:57 AM	H2 valve closed
6/17/2011	10:34:57 AM	BCl3 valve closed
6/17/2011	10:34:57 AM	PH3 valve closed
6/17/2011	10:34:57 AM	SiCl4 pre valve closed
6/17/2011	10:34:57 AM	SiCl4 post valve closed
6/17/2011	10:34:57 AM	Bubbler valve closed
6/17/2011	10:34:57 AM	Helium valve opened
6/17/2011	10:34:57 AM	Main Vac valve opened
6/17/2011	10:34:57 AM	Bypass valve opened
6/17/2011	10:34:57 AM	Helium MFC set to  100.000000
6/17/2011	10:34:57 AM	H2 MFC set to  0.000000
6/17/2011	10:34:57 AM	BCl3 MFC set to  0.000000
6/17/2011	10:34:57 AM	PHl3 MFC set to  0.000000
6/17/2011	10:34:57 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:34:57 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:34:57 AM	Tube furnace set to 0
6/17/2011	10:35:57 AM	Helium valve closed
6/17/2011	10:35:57 AM	H2 valve closed
6/17/2011	10:35:57 AM	BCl3 valve closed
6/17/2011	10:35:57 AM	PH3 valve closed
6/17/2011	10:35:57 AM	SiCl4 pre valve closed
6/17/2011	10:35:57 AM	SiCl4 post valve closed
6/17/2011	10:35:57 AM	Bubbler valve closed
6/17/2011	10:35:57 AM	Main Vac valve opened
6/17/2011	10:35:57 AM	Bypass valve opened
6/17/2011	10:35:57 AM	Helium MFC set to  0.000000
6/17/2011	10:35:57 AM	H2 MFC set to  0.000000
6/17/2011	10:35:57 AM	BCl3 MFC set to  0.000000
6/17/2011	10:35:57 AM	PHl3 MFC set to  0.000000
6/17/2011	10:35:57 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:35:57 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:35:57 AM	Tube furnace set to 0
6/17/2011	10:36:57 AM	H2 valve closed
6/17/2011	10:36:57 AM	BCl3 valve closed
6/17/2011	10:36:57 AM	PH3 valve closed
6/17/2011	10:36:57 AM	SiCl4 pre valve closed
6/17/2011	10:36:57 AM	SiCl4 post valve closed
6/17/2011	10:36:57 AM	Bubbler valve closed
6/17/2011	10:36:57 AM	Helium valve opened
6/17/2011	10:36:57 AM	Main Vac valve opened
6/17/2011	10:36:57 AM	Bypass valve opened
6/17/2011	10:36:57 AM	Helium MFC set to  100.000000
6/17/2011	10:36:57 AM	H2 MFC set to  0.000000
6/17/2011	10:36:57 AM	BCl3 MFC set to  0.000000
6/17/2011	10:36:57 AM	PHl3 MFC set to  0.000000
6/17/2011	10:36:57 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:36:57 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:36:57 AM	Tube furnace set to 0
6/17/2011	10:37:57 AM	Helium valve closed
6/17/2011	10:37:57 AM	H2 valve closed
6/17/2011	10:37:57 AM	BCl3 valve closed
6/17/2011	10:37:57 AM	PH3 valve closed
6/17/2011	10:37:57 AM	SiCl4 pre valve closed
6/17/2011	10:37:57 AM	SiCl4 post valve closed
6/17/2011	10:37:57 AM	Bubbler valve closed
6/17/2011	10:37:57 AM	Main Vac valve opened
6/17/2011	10:37:57 AM	Bypass valve opened
6/17/2011	10:37:57 AM	Helium MFC set to  0.000000
6/17/2011	10:37:57 AM	H2 MFC set to  0.000000
6/17/2011	10:37:57 AM	BCl3 MFC set to  0.000000
6/17/2011	10:37:57 AM	PHl3 MFC set to  0.000000
6/17/2011	10:37:57 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:37:57 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:37:58 AM	Tube furnace set to 0
6/17/2011	10:38:58 AM	H2 valve closed
6/17/2011	10:38:58 AM	BCl3 valve closed
6/17/2011	10:38:58 AM	PH3 valve closed
6/17/2011	10:38:58 AM	SiCl4 pre valve closed
6/17/2011	10:38:58 AM	SiCl4 post valve closed
6/17/2011	10:38:58 AM	Bubbler valve closed
6/17/2011	10:38:58 AM	Helium valve opened
6/17/2011	10:38:58 AM	Main Vac valve opened
6/17/2011	10:38:58 AM	Bypass valve opened
6/17/2011	10:38:58 AM	Helium MFC set to  100.000000
6/17/2011	10:38:58 AM	H2 MFC set to  0.000000
6/17/2011	10:38:58 AM	BCl3 MFC set to  0.000000
6/17/2011	10:38:58 AM	PHl3 MFC set to  0.000000
6/17/2011	10:38:58 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:38:58 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:38:58 AM	Tube furnace set to 0
6/17/2011	10:39:58 AM	Helium valve closed
6/17/2011	10:39:58 AM	H2 valve closed
6/17/2011	10:39:58 AM	BCl3 valve closed
6/17/2011	10:39:58 AM	PH3 valve closed
6/17/2011	10:39:58 AM	SiCl4 pre valve closed
6/17/2011	10:39:58 AM	SiCl4 post valve closed
6/17/2011	10:39:58 AM	Bubbler valve closed
6/17/2011	10:39:58 AM	Main Vac valve opened
6/17/2011	10:39:58 AM	Bypass valve opened
6/17/2011	10:39:58 AM	Helium MFC set to  0.000000
6/17/2011	10:39:58 AM	H2 MFC set to  0.000000
6/17/2011	10:39:58 AM	BCl3 MFC set to  0.000000
6/17/2011	10:39:58 AM	PHl3 MFC set to  0.000000
6/17/2011	10:39:58 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:39:58 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:39:58 AM	Tube furnace set to 0
6/17/2011	10:40:58 AM	H2 valve closed
6/17/2011	10:40:58 AM	BCl3 valve closed
6/17/2011	10:40:58 AM	PH3 valve closed
6/17/2011	10:40:58 AM	SiCl4 pre valve closed
6/17/2011	10:40:58 AM	SiCl4 post valve closed
6/17/2011	10:40:58 AM	Bubbler valve closed
6/17/2011	10:40:58 AM	Helium valve opened
6/17/2011	10:40:58 AM	Main Vac valve opened
6/17/2011	10:40:58 AM	Bypass valve opened
6/17/2011	10:40:58 AM	Helium MFC set to  100.000000
6/17/2011	10:40:58 AM	H2 MFC set to  0.000000
6/17/2011	10:40:58 AM	BCl3 MFC set to  0.000000
6/17/2011	10:40:58 AM	PHl3 MFC set to  0.000000
6/17/2011	10:40:58 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:40:58 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:40:58 AM	Tube furnace set to 0
6/17/2011	10:41:58 AM	Helium valve closed
6/17/2011	10:41:58 AM	H2 valve closed
6/17/2011	10:41:58 AM	BCl3 valve closed
6/17/2011	10:41:58 AM	PH3 valve closed
6/17/2011	10:41:58 AM	SiCl4 pre valve closed
6/17/2011	10:41:58 AM	SiCl4 post valve closed
6/17/2011	10:41:58 AM	Bubbler valve closed
6/17/2011	10:41:58 AM	Main Vac valve opened
6/17/2011	10:41:58 AM	Bypass valve opened
6/17/2011	10:41:58 AM	Helium MFC set to  0.000000
6/17/2011	10:41:58 AM	H2 MFC set to  0.000000
6/17/2011	10:41:58 AM	BCl3 MFC set to  0.000000
6/17/2011	10:41:58 AM	PHl3 MFC set to  0.000000
6/17/2011	10:41:58 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:41:58 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:41:58 AM	Tube furnace set to 0
6/17/2011	10:42:58 AM	H2 valve closed
6/17/2011	10:42:58 AM	BCl3 valve closed
6/17/2011	10:42:58 AM	PH3 valve closed
6/17/2011	10:42:58 AM	SiCl4 pre valve closed
6/17/2011	10:42:58 AM	SiCl4 post valve closed
6/17/2011	10:42:58 AM	Bubbler valve closed
6/17/2011	10:42:58 AM	Helium valve opened
6/17/2011	10:42:58 AM	Main Vac valve opened
6/17/2011	10:42:58 AM	Bypass valve opened
6/17/2011	10:42:58 AM	Helium MFC set to  100.000000
6/17/2011	10:42:58 AM	H2 MFC set to  0.000000
6/17/2011	10:42:58 AM	BCl3 MFC set to  0.000000
6/17/2011	10:42:58 AM	PHl3 MFC set to  0.000000
6/17/2011	10:42:58 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:42:58 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:42:59 AM	Tube furnace set to 0
6/17/2011	10:43:59 AM	Helium valve closed
6/17/2011	10:43:59 AM	H2 valve closed
6/17/2011	10:43:59 AM	BCl3 valve closed
6/17/2011	10:43:59 AM	PH3 valve closed
6/17/2011	10:43:59 AM	SiCl4 pre valve closed
6/17/2011	10:43:59 AM	SiCl4 post valve closed
6/17/2011	10:43:59 AM	Bubbler valve closed
6/17/2011	10:43:59 AM	Main Vac valve opened
6/17/2011	10:43:59 AM	Bypass valve opened
6/17/2011	10:43:59 AM	Helium MFC set to  0.000000
6/17/2011	10:43:59 AM	H2 MFC set to  0.000000
6/17/2011	10:43:59 AM	BCl3 MFC set to  0.000000
6/17/2011	10:43:59 AM	PHl3 MFC set to  0.000000
6/17/2011	10:43:59 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:43:59 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:43:59 AM	Tube furnace set to 0
6/17/2011	10:44:59 AM	H2 valve closed
6/17/2011	10:44:59 AM	BCl3 valve closed
6/17/2011	10:44:59 AM	PH3 valve closed
6/17/2011	10:44:59 AM	SiCl4 pre valve closed
6/17/2011	10:44:59 AM	SiCl4 post valve closed
6/17/2011	10:44:59 AM	Bubbler valve closed
6/17/2011	10:44:59 AM	Helium valve opened
6/17/2011	10:44:59 AM	Main Vac valve opened
6/17/2011	10:44:59 AM	Bypass valve opened
6/17/2011	10:44:59 AM	Helium MFC set to  100.000000
6/17/2011	10:44:59 AM	H2 MFC set to  0.000000
6/17/2011	10:44:59 AM	BCl3 MFC set to  0.000000
6/17/2011	10:44:59 AM	PHl3 MFC set to  0.000000
6/17/2011	10:44:59 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:44:59 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:44:59 AM	Tube furnace set to 0
6/17/2011	10:45:59 AM	Helium valve closed
6/17/2011	10:45:59 AM	H2 valve closed
6/17/2011	10:45:59 AM	BCl3 valve closed
6/17/2011	10:45:59 AM	PH3 valve closed
6/17/2011	10:45:59 AM	SiCl4 pre valve closed
6/17/2011	10:45:59 AM	SiCl4 post valve closed
6/17/2011	10:45:59 AM	Bubbler valve closed
6/17/2011	10:45:59 AM	Main Vac valve opened
6/17/2011	10:45:59 AM	Bypass valve opened
6/17/2011	10:45:59 AM	Helium MFC set to  0.000000
6/17/2011	10:45:59 AM	H2 MFC set to  0.000000
6/17/2011	10:45:59 AM	BCl3 MFC set to  0.000000
6/17/2011	10:45:59 AM	PHl3 MFC set to  0.000000
6/17/2011	10:45:59 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:45:59 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:45:59 AM	Tube furnace set to 0
6/17/2011	10:46:59 AM	H2 valve closed
6/17/2011	10:46:59 AM	BCl3 valve closed
6/17/2011	10:46:59 AM	PH3 valve closed
6/17/2011	10:46:59 AM	SiCl4 pre valve closed
6/17/2011	10:46:59 AM	SiCl4 post valve closed
6/17/2011	10:46:59 AM	Bubbler valve closed
6/17/2011	10:46:59 AM	Helium valve opened
6/17/2011	10:46:59 AM	Main Vac valve opened
6/17/2011	10:46:59 AM	Bypass valve opened
6/17/2011	10:46:59 AM	Helium MFC set to  100.000000
6/17/2011	10:46:59 AM	H2 MFC set to  0.000000
6/17/2011	10:46:59 AM	BCl3 MFC set to  0.000000
6/17/2011	10:46:59 AM	PHl3 MFC set to  0.000000
6/17/2011	10:46:59 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:46:59 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:46:59 AM	Tube furnace set to 0
6/17/2011	10:47:59 AM	Helium valve closed
6/17/2011	10:47:59 AM	H2 valve closed
6/17/2011	10:47:59 AM	BCl3 valve closed
6/17/2011	10:47:59 AM	PH3 valve closed
6/17/2011	10:47:59 AM	SiCl4 pre valve closed
6/17/2011	10:47:59 AM	SiCl4 post valve closed
6/17/2011	10:47:59 AM	Bubbler valve closed
6/17/2011	10:47:59 AM	Main Vac valve opened
6/17/2011	10:47:59 AM	Bypass valve opened
6/17/2011	10:47:59 AM	Helium MFC set to  0.000000
6/17/2011	10:47:59 AM	H2 MFC set to  0.000000
6/17/2011	10:47:59 AM	BCl3 MFC set to  0.000000
6/17/2011	10:47:59 AM	PHl3 MFC set to  0.000000
6/17/2011	10:47:59 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:47:59 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:48:00 AM	Tube furnace set to 0
6/17/2011	10:49:00 AM	H2 valve closed
6/17/2011	10:49:00 AM	BCl3 valve closed
6/17/2011	10:49:00 AM	PH3 valve closed
6/17/2011	10:49:00 AM	SiCl4 pre valve closed
6/17/2011	10:49:00 AM	SiCl4 post valve closed
6/17/2011	10:49:00 AM	Bubbler valve closed
6/17/2011	10:49:00 AM	Helium valve opened
6/17/2011	10:49:00 AM	Main Vac valve opened
6/17/2011	10:49:00 AM	Bypass valve opened
6/17/2011	10:49:00 AM	Helium MFC set to  100.000000
6/17/2011	10:49:00 AM	H2 MFC set to  0.000000
6/17/2011	10:49:00 AM	BCl3 MFC set to  0.000000
6/17/2011	10:49:00 AM	PHl3 MFC set to  0.000000
6/17/2011	10:49:00 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:49:00 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:49:00 AM	Tube furnace set to 0
6/17/2011	10:50:00 AM	Helium valve closed
6/17/2011	10:50:00 AM	H2 valve closed
6/17/2011	10:50:00 AM	BCl3 valve closed
6/17/2011	10:50:00 AM	PH3 valve closed
6/17/2011	10:50:00 AM	SiCl4 pre valve closed
6/17/2011	10:50:00 AM	SiCl4 post valve closed
6/17/2011	10:50:00 AM	Bubbler valve closed
6/17/2011	10:50:00 AM	Main Vac valve opened
6/17/2011	10:50:00 AM	Bypass valve opened
6/17/2011	10:50:00 AM	Helium MFC set to  0.000000
6/17/2011	10:50:00 AM	H2 MFC set to  0.000000
6/17/2011	10:50:00 AM	BCl3 MFC set to  0.000000
6/17/2011	10:50:00 AM	PHl3 MFC set to  0.000000
6/17/2011	10:50:00 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:50:00 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:50:00 AM	Tube furnace set to 0
6/17/2011	10:51:00 AM	H2 valve closed
6/17/2011	10:51:00 AM	BCl3 valve closed
6/17/2011	10:51:00 AM	PH3 valve closed
6/17/2011	10:51:00 AM	SiCl4 pre valve closed
6/17/2011	10:51:00 AM	SiCl4 post valve closed
6/17/2011	10:51:00 AM	Bubbler valve closed
6/17/2011	10:51:00 AM	Helium valve opened
6/17/2011	10:51:00 AM	Main Vac valve opened
6/17/2011	10:51:00 AM	Bypass valve opened
6/17/2011	10:51:00 AM	Helium MFC set to  100.000000
6/17/2011	10:51:00 AM	H2 MFC set to  0.000000
6/17/2011	10:51:00 AM	BCl3 MFC set to  0.000000
6/17/2011	10:51:00 AM	PHl3 MFC set to  0.000000
6/17/2011	10:51:00 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:51:00 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:51:00 AM	Tube furnace set to 0
6/17/2011	10:52:00 AM	Helium valve closed
6/17/2011	10:52:00 AM	H2 valve closed
6/17/2011	10:52:00 AM	BCl3 valve closed
6/17/2011	10:52:00 AM	PH3 valve closed
6/17/2011	10:52:00 AM	SiCl4 pre valve closed
6/17/2011	10:52:00 AM	SiCl4 post valve closed
6/17/2011	10:52:00 AM	Bubbler valve closed
6/17/2011	10:52:00 AM	Main Vac valve opened
6/17/2011	10:52:00 AM	Bypass valve opened
6/17/2011	10:52:00 AM	Helium MFC set to  0.000000
6/17/2011	10:52:00 AM	H2 MFC set to  0.000000
6/17/2011	10:52:00 AM	BCl3 MFC set to  0.000000
6/17/2011	10:52:00 AM	PHl3 MFC set to  0.000000
6/17/2011	10:52:00 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:52:00 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:52:00 AM	Tube furnace set to 0
6/17/2011	10:53:00 AM	H2 valve closed
6/17/2011	10:53:01 AM	BCl3 valve closed
6/17/2011	10:53:01 AM	PH3 valve closed
6/17/2011	10:53:01 AM	SiCl4 pre valve closed
6/17/2011	10:53:01 AM	SiCl4 post valve closed
6/17/2011	10:53:01 AM	Bubbler valve closed
6/17/2011	10:53:01 AM	Helium valve opened
6/17/2011	10:53:01 AM	Main Vac valve opened
6/17/2011	10:53:01 AM	Bypass valve opened
6/17/2011	10:53:01 AM	Helium MFC set to  100.000000
6/17/2011	10:53:01 AM	H2 MFC set to  0.000000
6/17/2011	10:53:01 AM	BCl3 MFC set to  0.000000
6/17/2011	10:53:01 AM	PHl3 MFC set to  0.000000
6/17/2011	10:53:01 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:53:01 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:53:01 AM	Tube furnace set to 0
6/17/2011	10:54:01 AM	Helium valve closed
6/17/2011	10:54:01 AM	H2 valve closed
6/17/2011	10:54:01 AM	BCl3 valve closed
6/17/2011	10:54:01 AM	PH3 valve closed
6/17/2011	10:54:01 AM	SiCl4 pre valve closed
6/17/2011	10:54:01 AM	SiCl4 post valve closed
6/17/2011	10:54:01 AM	Bubbler valve closed
6/17/2011	10:54:01 AM	Main Vac valve opened
6/17/2011	10:54:01 AM	Bypass valve opened
6/17/2011	10:54:01 AM	Helium MFC set to  0.000000
6/17/2011	10:54:01 AM	H2 MFC set to  0.000000
6/17/2011	10:54:01 AM	BCl3 MFC set to  0.000000
6/17/2011	10:54:01 AM	PHl3 MFC set to  0.000000
6/17/2011	10:54:01 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:54:01 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:54:01 AM	Tube furnace set to 0
6/17/2011	10:54:02 AM	Run finished at 10:54 AM
6/17/2011	10:54:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/17/2011	10:56:11 AM	Recipe started at 10:56 AM
6/17/2011	10:56:11 AM	Helium valve closed
6/17/2011	10:56:11 AM	BCl3 valve closed
6/17/2011	10:56:11 AM	PH3 valve closed
6/17/2011	10:56:11 AM	SiCl4 pre valve closed
6/17/2011	10:56:11 AM	SiCl4 post valve closed
6/17/2011	10:56:11 AM	Main Vac valve closed
6/17/2011	10:56:11 AM	Bypass valve closed
6/17/2011	10:56:11 AM	Bubbler valve closed
6/17/2011	10:56:11 AM	H2 valve opened
6/17/2011	10:56:11 AM	Helium MFC set to  0.000000
6/17/2011	10:56:11 AM	H2 MFC set to  500.000000
6/17/2011	10:56:11 AM	BCl3 MFC set to  0.000000
6/17/2011	10:56:11 AM	PHl3 MFC set to  0.000000
6/17/2011	10:56:11 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:56:11 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:56:11 AM	Tube furnace set to 200
6/17/2011	10:57:32 AM	Helium valve closed
6/17/2011	10:57:32 AM	BCl3 valve closed
6/17/2011	10:57:32 AM	PH3 valve closed
6/17/2011	10:57:32 AM	SiCl4 pre valve closed
6/17/2011	10:57:32 AM	SiCl4 post valve closed
6/17/2011	10:57:32 AM	Main Vac valve closed
6/17/2011	10:57:32 AM	Bypass valve closed
6/17/2011	10:57:32 AM	H2 valve opened
6/17/2011	10:57:32 AM	Bubbler valve opened
6/17/2011	10:57:32 AM	Helium MFC set to  0.000000
6/17/2011	10:57:32 AM	H2 MFC set to  400.000000
6/17/2011	10:57:32 AM	BCl3 MFC set to  0.000000
6/17/2011	10:57:32 AM	PHl3 MFC set to  0.000000
6/17/2011	10:57:32 AM	SiCl4 MFC set to  0.000000
6/17/2011	10:57:32 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	10:57:32 AM	Tube furnace set to 1000
6/17/2011	11:17:32 AM	Helium valve closed
6/17/2011	11:17:32 AM	BCl3 valve closed
6/17/2011	11:17:32 AM	PH3 valve closed
6/17/2011	11:17:32 AM	SiCl4 pre valve closed
6/17/2011	11:17:32 AM	SiCl4 post valve closed
6/17/2011	11:17:32 AM	Main Vac valve closed
6/17/2011	11:17:32 AM	Bypass valve closed
6/17/2011	11:17:32 AM	H2 valve opened
6/17/2011	11:17:32 AM	Bubbler valve opened
6/17/2011	11:17:32 AM	Helium MFC set to  0.000000
6/17/2011	11:17:32 AM	H2 MFC set to  500.000000
6/17/2011	11:17:32 AM	BCl3 MFC set to  0.000000
6/17/2011	11:17:32 AM	PHl3 MFC set to  0.000000
6/17/2011	11:17:32 AM	SiCl4 MFC set to  0.000000
6/17/2011	11:17:32 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	11:17:32 AM	Tube furnace set to 1000
6/17/2011	11:37:32 AM	H2 valve closed
6/17/2011	11:37:32 AM	BCl3 valve closed
6/17/2011	11:37:32 AM	PH3 valve closed
6/17/2011	11:37:32 AM	SiCl4 pre valve closed
6/17/2011	11:37:32 AM	SiCl4 post valve closed
6/17/2011	11:37:32 AM	Main Vac valve closed
6/17/2011	11:37:32 AM	Bypass valve closed
6/17/2011	11:37:32 AM	Helium valve opened
6/17/2011	11:37:32 AM	Bubbler valve opened
6/17/2011	11:37:32 AM	Helium MFC set to  500.000000
6/17/2011	11:37:32 AM	H2 MFC set to  0.000000
6/17/2011	11:37:32 AM	BCl3 MFC set to  0.000000
6/17/2011	11:37:32 AM	PHl3 MFC set to  0.000000
6/17/2011	11:37:32 AM	SiCl4 MFC set to  0.000000
6/17/2011	11:37:32 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	11:37:32 AM	Tube furnace set to 0
6/17/2011	11:57:32 AM	Helium valve closed
6/17/2011	11:57:32 AM	H2 valve closed
6/17/2011	11:57:32 AM	BCl3 valve closed
6/17/2011	11:57:32 AM	PH3 valve closed
6/17/2011	11:57:32 AM	SiCl4 pre valve closed
6/17/2011	11:57:32 AM	SiCl4 post valve closed
6/17/2011	11:57:32 AM	Main Vac valve closed
6/17/2011	11:57:32 AM	Bypass valve closed
6/17/2011	11:57:32 AM	Bubbler valve closed
6/17/2011	11:57:32 AM	Helium MFC set to  0.000000
6/17/2011	11:57:32 AM	H2 MFC set to  0.000000
6/17/2011	11:57:32 AM	BCl3 MFC set to  0.000000
6/17/2011	11:57:32 AM	PHl3 MFC set to  0.000000
6/17/2011	11:57:32 AM	SiCl4 MFC set to  0.000000
6/17/2011	11:57:32 AM	Bypass solenoid MFC set to  0.000000
6/17/2011	11:57:33 AM	Tube furnace set to 0
6/17/2011	11:57:33 AM	Run finished at 11:57 AM
6/17/2011	1:22:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2011	1:22:01 PM	Recipe started at 1:22 PM
6/17/2011	1:22:01 PM	H2 valve closed
6/17/2011	1:22:01 PM	BCl3 valve closed
6/17/2011	1:22:01 PM	PH3 valve closed
6/17/2011	1:22:01 PM	SiCl4 pre valve closed
6/17/2011	1:22:01 PM	SiCl4 post valve closed
6/17/2011	1:22:01 PM	Main Vac valve closed
6/17/2011	1:22:01 PM	Bypass valve closed
6/17/2011	1:22:01 PM	Bubbler valve closed
6/17/2011	1:22:01 PM	Helium valve opened
6/17/2011	1:22:01 PM	Helium MFC set to  500.000000
6/17/2011	1:22:01 PM	H2 MFC set to  0.000000
6/17/2011	1:22:01 PM	BCl3 MFC set to  0.000000
6/17/2011	1:22:01 PM	PHl3 MFC set to  0.000000
6/17/2011	1:22:01 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:22:01 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:22:01 PM	Tube furnace set to 0
6/17/2011	1:22:07 PM	Helium valve closed
6/17/2011	1:22:07 PM	H2 valve closed
6/17/2011	1:22:07 PM	BCl3 valve closed
6/17/2011	1:22:07 PM	PH3 valve closed
6/17/2011	1:22:07 PM	SiCl4 pre valve closed
6/17/2011	1:22:07 PM	SiCl4 post valve closed
6/17/2011	1:22:07 PM	Main Vac valve closed
6/17/2011	1:22:07 PM	Bypass valve closed
6/17/2011	1:22:07 PM	Bubbler valve closed
6/17/2011	1:22:07 PM	Helium MFC set to  0.000000
6/17/2011	1:22:07 PM	H2 MFC set to  0.000000
6/17/2011	1:22:07 PM	BCl3 MFC set to  0.000000
6/17/2011	1:22:07 PM	PHl3 MFC set to  0.000000
6/17/2011	1:22:07 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:22:07 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:22:07 PM	Tube furnace set to 0
6/17/2011	1:22:07 PM	Run finished at 1:22 PM
6/17/2011	1:22:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2011	1:25:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2011	1:25:31 PM	Recipe started at 1:25 PM
6/17/2011	1:25:32 PM	Helium valve closed
6/17/2011	1:25:32 PM	H2 valve closed
6/17/2011	1:25:32 PM	BCl3 valve closed
6/17/2011	1:25:32 PM	PH3 valve closed
6/17/2011	1:25:32 PM	SiCl4 pre valve closed
6/17/2011	1:25:32 PM	SiCl4 post valve closed
6/17/2011	1:25:32 PM	Main Vac valve closed
6/17/2011	1:25:32 PM	Bubbler valve closed
6/17/2011	1:25:32 PM	Bypass valve opened
6/17/2011	1:25:32 PM	Helium MFC set to  0.000000
6/17/2011	1:25:32 PM	H2 MFC set to  0.000000
6/17/2011	1:25:32 PM	BCl3 MFC set to  0.000000
6/17/2011	1:25:32 PM	PHl3 MFC set to  0.000000
6/17/2011	1:25:32 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:25:32 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:25:32 PM	Tube furnace set to 0
6/17/2011	1:26:02 PM	Helium valve closed
6/17/2011	1:26:02 PM	H2 valve closed
6/17/2011	1:26:02 PM	BCl3 valve closed
6/17/2011	1:26:02 PM	PH3 valve closed
6/17/2011	1:26:02 PM	SiCl4 pre valve closed
6/17/2011	1:26:02 PM	SiCl4 post valve closed
6/17/2011	1:26:02 PM	Bubbler valve closed
6/17/2011	1:26:02 PM	Main Vac valve opened
6/17/2011	1:26:02 PM	Bypass valve opened
6/17/2011	1:26:02 PM	Helium MFC set to  0.000000
6/17/2011	1:26:02 PM	H2 MFC set to  0.000000
6/17/2011	1:26:02 PM	BCl3 MFC set to  0.000000
6/17/2011	1:26:02 PM	PHl3 MFC set to  0.000000
6/17/2011	1:26:02 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:26:02 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:26:02 PM	Tube furnace set to 0
6/17/2011	1:26:02 PM	Run finished at 1:26 PM
6/17/2011	1:26:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2011	1:26:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/17/2011	1:26:29 PM	Recipe started at 1:26 PM
6/17/2011	1:26:29 PM	Helium valve closed
6/17/2011	1:26:29 PM	H2 valve closed
6/17/2011	1:26:29 PM	BCl3 valve closed
6/17/2011	1:26:29 PM	PH3 valve closed
6/17/2011	1:26:29 PM	SiCl4 pre valve closed
6/17/2011	1:26:29 PM	SiCl4 post valve closed
6/17/2011	1:26:29 PM	Main Vac valve closed
6/17/2011	1:26:29 PM	Bubbler valve closed
6/17/2011	1:26:29 PM	Bypass valve opened
6/17/2011	1:26:29 PM	Helium MFC set to  0.000000
6/17/2011	1:26:29 PM	H2 MFC set to  0.000000
6/17/2011	1:26:29 PM	BCl3 MFC set to  0.000000
6/17/2011	1:26:29 PM	PHl3 MFC set to  0.000000
6/17/2011	1:26:29 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:26:29 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:26:30 PM	Tube furnace set to 0
6/17/2011	1:26:30 PM	Helium valve closed
6/17/2011	1:26:30 PM	H2 valve closed
6/17/2011	1:26:30 PM	BCl3 valve closed
6/17/2011	1:26:30 PM	PH3 valve closed
6/17/2011	1:26:30 PM	SiCl4 pre valve closed
6/17/2011	1:26:30 PM	SiCl4 post valve closed
6/17/2011	1:26:30 PM	Bubbler valve closed
6/17/2011	1:26:30 PM	Main Vac valve opened
6/17/2011	1:26:30 PM	Bypass valve opened
6/17/2011	1:26:30 PM	Helium MFC set to  0.000000
6/17/2011	1:26:30 PM	H2 MFC set to  0.000000
6/17/2011	1:26:30 PM	BCl3 MFC set to  0.000000
6/17/2011	1:26:30 PM	PHl3 MFC set to  0.000000
6/17/2011	1:26:30 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:26:30 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:26:30 PM	Tube furnace set to 0
6/17/2011	1:27:30 PM	H2 valve closed
6/17/2011	1:27:30 PM	BCl3 valve closed
6/17/2011	1:27:30 PM	PH3 valve closed
6/17/2011	1:27:30 PM	SiCl4 pre valve closed
6/17/2011	1:27:30 PM	SiCl4 post valve closed
6/17/2011	1:27:30 PM	Bubbler valve closed
6/17/2011	1:27:30 PM	Helium valve opened
6/17/2011	1:27:30 PM	Main Vac valve opened
6/17/2011	1:27:30 PM	Bypass valve opened
6/17/2011	1:27:30 PM	Helium MFC set to  100.000000
6/17/2011	1:27:30 PM	H2 MFC set to  0.000000
6/17/2011	1:27:30 PM	BCl3 MFC set to  0.000000
6/17/2011	1:27:30 PM	PHl3 MFC set to  0.000000
6/17/2011	1:27:30 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:27:30 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:27:30 PM	Tube furnace set to 0
6/17/2011	1:28:30 PM	Helium valve closed
6/17/2011	1:28:30 PM	H2 valve closed
6/17/2011	1:28:30 PM	BCl3 valve closed
6/17/2011	1:28:30 PM	PH3 valve closed
6/17/2011	1:28:30 PM	SiCl4 pre valve closed
6/17/2011	1:28:30 PM	SiCl4 post valve closed
6/17/2011	1:28:30 PM	Bubbler valve closed
6/17/2011	1:28:30 PM	Main Vac valve opened
6/17/2011	1:28:30 PM	Bypass valve opened
6/17/2011	1:28:30 PM	Helium MFC set to  0.000000
6/17/2011	1:28:30 PM	H2 MFC set to  0.000000
6/17/2011	1:28:30 PM	BCl3 MFC set to  0.000000
6/17/2011	1:28:30 PM	PHl3 MFC set to  0.000000
6/17/2011	1:28:30 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:28:30 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:28:31 PM	Tube furnace set to 0
6/17/2011	1:29:31 PM	H2 valve closed
6/17/2011	1:29:31 PM	BCl3 valve closed
6/17/2011	1:29:31 PM	PH3 valve closed
6/17/2011	1:29:31 PM	SiCl4 pre valve closed
6/17/2011	1:29:31 PM	SiCl4 post valve closed
6/17/2011	1:29:31 PM	Bubbler valve closed
6/17/2011	1:29:31 PM	Helium valve opened
6/17/2011	1:29:31 PM	Main Vac valve opened
6/17/2011	1:29:31 PM	Bypass valve opened
6/17/2011	1:29:31 PM	Helium MFC set to  100.000000
6/17/2011	1:29:31 PM	H2 MFC set to  0.000000
6/17/2011	1:29:31 PM	BCl3 MFC set to  0.000000
6/17/2011	1:29:31 PM	PHl3 MFC set to  0.000000
6/17/2011	1:29:31 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:29:31 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:29:31 PM	Tube furnace set to 0
6/17/2011	1:30:31 PM	Helium valve closed
6/17/2011	1:30:31 PM	H2 valve closed
6/17/2011	1:30:31 PM	BCl3 valve closed
6/17/2011	1:30:31 PM	PH3 valve closed
6/17/2011	1:30:31 PM	SiCl4 pre valve closed
6/17/2011	1:30:31 PM	SiCl4 post valve closed
6/17/2011	1:30:31 PM	Bubbler valve closed
6/17/2011	1:30:31 PM	Main Vac valve opened
6/17/2011	1:30:31 PM	Bypass valve opened
6/17/2011	1:30:31 PM	Helium MFC set to  0.000000
6/17/2011	1:30:31 PM	H2 MFC set to  0.000000
6/17/2011	1:30:31 PM	BCl3 MFC set to  0.000000
6/17/2011	1:30:31 PM	PHl3 MFC set to  0.000000
6/17/2011	1:30:31 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:30:31 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:30:31 PM	Tube furnace set to 0
6/17/2011	1:31:31 PM	H2 valve closed
6/17/2011	1:31:31 PM	BCl3 valve closed
6/17/2011	1:31:31 PM	PH3 valve closed
6/17/2011	1:31:31 PM	SiCl4 pre valve closed
6/17/2011	1:31:31 PM	SiCl4 post valve closed
6/17/2011	1:31:31 PM	Bubbler valve closed
6/17/2011	1:31:31 PM	Helium valve opened
6/17/2011	1:31:31 PM	Main Vac valve opened
6/17/2011	1:31:31 PM	Bypass valve opened
6/17/2011	1:31:31 PM	Helium MFC set to  100.000000
6/17/2011	1:31:31 PM	H2 MFC set to  0.000000
6/17/2011	1:31:31 PM	BCl3 MFC set to  0.000000
6/17/2011	1:31:31 PM	PHl3 MFC set to  0.000000
6/17/2011	1:31:31 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:31:31 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:31:31 PM	Tube furnace set to 0
6/17/2011	1:32:31 PM	Helium valve closed
6/17/2011	1:32:31 PM	H2 valve closed
6/17/2011	1:32:31 PM	BCl3 valve closed
6/17/2011	1:32:31 PM	PH3 valve closed
6/17/2011	1:32:31 PM	SiCl4 pre valve closed
6/17/2011	1:32:31 PM	SiCl4 post valve closed
6/17/2011	1:32:31 PM	Bubbler valve closed
6/17/2011	1:32:31 PM	Main Vac valve opened
6/17/2011	1:32:31 PM	Bypass valve opened
6/17/2011	1:32:31 PM	Helium MFC set to  0.000000
6/17/2011	1:32:31 PM	H2 MFC set to  0.000000
6/17/2011	1:32:31 PM	BCl3 MFC set to  0.000000
6/17/2011	1:32:31 PM	PHl3 MFC set to  0.000000
6/17/2011	1:32:31 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:32:31 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:32:31 PM	Tube furnace set to 0
6/17/2011	1:33:31 PM	H2 valve closed
6/17/2011	1:33:31 PM	BCl3 valve closed
6/17/2011	1:33:31 PM	PH3 valve closed
6/17/2011	1:33:31 PM	SiCl4 pre valve closed
6/17/2011	1:33:31 PM	SiCl4 post valve closed
6/17/2011	1:33:31 PM	Bubbler valve closed
6/17/2011	1:33:31 PM	Helium valve opened
6/17/2011	1:33:31 PM	Main Vac valve opened
6/17/2011	1:33:31 PM	Bypass valve opened
6/17/2011	1:33:31 PM	Helium MFC set to  100.000000
6/17/2011	1:33:31 PM	H2 MFC set to  0.000000
6/17/2011	1:33:31 PM	BCl3 MFC set to  0.000000
6/17/2011	1:33:31 PM	PHl3 MFC set to  0.000000
6/17/2011	1:33:31 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:33:31 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:33:32 PM	Tube furnace set to 0
6/17/2011	1:34:32 PM	Helium valve closed
6/17/2011	1:34:32 PM	H2 valve closed
6/17/2011	1:34:32 PM	BCl3 valve closed
6/17/2011	1:34:32 PM	PH3 valve closed
6/17/2011	1:34:32 PM	SiCl4 pre valve closed
6/17/2011	1:34:32 PM	SiCl4 post valve closed
6/17/2011	1:34:32 PM	Bubbler valve closed
6/17/2011	1:34:32 PM	Main Vac valve opened
6/17/2011	1:34:32 PM	Bypass valve opened
6/17/2011	1:34:32 PM	Helium MFC set to  0.000000
6/17/2011	1:34:32 PM	H2 MFC set to  0.000000
6/17/2011	1:34:32 PM	BCl3 MFC set to  0.000000
6/17/2011	1:34:32 PM	PHl3 MFC set to  0.000000
6/17/2011	1:34:32 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:34:32 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:34:32 PM	Tube furnace set to 0
6/17/2011	1:35:32 PM	H2 valve closed
6/17/2011	1:35:32 PM	BCl3 valve closed
6/17/2011	1:35:32 PM	PH3 valve closed
6/17/2011	1:35:32 PM	SiCl4 pre valve closed
6/17/2011	1:35:32 PM	SiCl4 post valve closed
6/17/2011	1:35:32 PM	Bubbler valve closed
6/17/2011	1:35:32 PM	Helium valve opened
6/17/2011	1:35:32 PM	Main Vac valve opened
6/17/2011	1:35:32 PM	Bypass valve opened
6/17/2011	1:35:32 PM	Helium MFC set to  100.000000
6/17/2011	1:35:32 PM	H2 MFC set to  0.000000
6/17/2011	1:35:32 PM	BCl3 MFC set to  0.000000
6/17/2011	1:35:32 PM	PHl3 MFC set to  0.000000
6/17/2011	1:35:32 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:35:32 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:35:32 PM	Tube furnace set to 0
6/17/2011	1:36:32 PM	Helium valve closed
6/17/2011	1:36:32 PM	H2 valve closed
6/17/2011	1:36:32 PM	BCl3 valve closed
6/17/2011	1:36:32 PM	PH3 valve closed
6/17/2011	1:36:32 PM	SiCl4 pre valve closed
6/17/2011	1:36:32 PM	SiCl4 post valve closed
6/17/2011	1:36:32 PM	Bubbler valve closed
6/17/2011	1:36:32 PM	Main Vac valve opened
6/17/2011	1:36:32 PM	Bypass valve opened
6/17/2011	1:36:32 PM	Helium MFC set to  0.000000
6/17/2011	1:36:32 PM	H2 MFC set to  0.000000
6/17/2011	1:36:32 PM	BCl3 MFC set to  0.000000
6/17/2011	1:36:32 PM	PHl3 MFC set to  0.000000
6/17/2011	1:36:32 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:36:32 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:36:32 PM	Tube furnace set to 0
6/17/2011	1:37:32 PM	H2 valve closed
6/17/2011	1:37:32 PM	BCl3 valve closed
6/17/2011	1:37:32 PM	PH3 valve closed
6/17/2011	1:37:32 PM	SiCl4 pre valve closed
6/17/2011	1:37:32 PM	SiCl4 post valve closed
6/17/2011	1:37:32 PM	Bubbler valve closed
6/17/2011	1:37:32 PM	Helium valve opened
6/17/2011	1:37:32 PM	Main Vac valve opened
6/17/2011	1:37:32 PM	Bypass valve opened
6/17/2011	1:37:32 PM	Helium MFC set to  100.000000
6/17/2011	1:37:32 PM	H2 MFC set to  0.000000
6/17/2011	1:37:32 PM	BCl3 MFC set to  0.000000
6/17/2011	1:37:32 PM	PHl3 MFC set to  0.000000
6/17/2011	1:37:32 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:37:32 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:37:33 PM	Tube furnace set to 0
6/17/2011	1:38:33 PM	Helium valve closed
6/17/2011	1:38:33 PM	H2 valve closed
6/17/2011	1:38:33 PM	BCl3 valve closed
6/17/2011	1:38:33 PM	PH3 valve closed
6/17/2011	1:38:33 PM	SiCl4 pre valve closed
6/17/2011	1:38:33 PM	SiCl4 post valve closed
6/17/2011	1:38:33 PM	Bubbler valve closed
6/17/2011	1:38:33 PM	Main Vac valve opened
6/17/2011	1:38:33 PM	Bypass valve opened
6/17/2011	1:38:33 PM	Helium MFC set to  0.000000
6/17/2011	1:38:33 PM	H2 MFC set to  0.000000
6/17/2011	1:38:33 PM	BCl3 MFC set to  0.000000
6/17/2011	1:38:33 PM	PHl3 MFC set to  0.000000
6/17/2011	1:38:33 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:38:33 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:38:33 PM	Tube furnace set to 0
6/17/2011	1:39:33 PM	H2 valve closed
6/17/2011	1:39:33 PM	BCl3 valve closed
6/17/2011	1:39:33 PM	PH3 valve closed
6/17/2011	1:39:33 PM	SiCl4 pre valve closed
6/17/2011	1:39:33 PM	SiCl4 post valve closed
6/17/2011	1:39:33 PM	Bubbler valve closed
6/17/2011	1:39:33 PM	Helium valve opened
6/17/2011	1:39:33 PM	Main Vac valve opened
6/17/2011	1:39:33 PM	Bypass valve opened
6/17/2011	1:39:33 PM	Helium MFC set to  100.000000
6/17/2011	1:39:33 PM	H2 MFC set to  0.000000
6/17/2011	1:39:33 PM	BCl3 MFC set to  0.000000
6/17/2011	1:39:33 PM	PHl3 MFC set to  0.000000
6/17/2011	1:39:33 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:39:33 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:39:33 PM	Tube furnace set to 0
6/17/2011	1:40:33 PM	Helium valve closed
6/17/2011	1:40:33 PM	H2 valve closed
6/17/2011	1:40:33 PM	BCl3 valve closed
6/17/2011	1:40:33 PM	PH3 valve closed
6/17/2011	1:40:33 PM	SiCl4 pre valve closed
6/17/2011	1:40:33 PM	SiCl4 post valve closed
6/17/2011	1:40:33 PM	Bubbler valve closed
6/17/2011	1:40:33 PM	Main Vac valve opened
6/17/2011	1:40:33 PM	Bypass valve opened
6/17/2011	1:40:33 PM	Helium MFC set to  0.000000
6/17/2011	1:40:33 PM	H2 MFC set to  0.000000
6/17/2011	1:40:33 PM	BCl3 MFC set to  0.000000
6/17/2011	1:40:33 PM	PHl3 MFC set to  0.000000
6/17/2011	1:40:33 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:40:33 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:40:33 PM	Tube furnace set to 0
6/17/2011	1:41:33 PM	H2 valve closed
6/17/2011	1:41:33 PM	BCl3 valve closed
6/17/2011	1:41:33 PM	PH3 valve closed
6/17/2011	1:41:33 PM	SiCl4 pre valve closed
6/17/2011	1:41:33 PM	SiCl4 post valve closed
6/17/2011	1:41:33 PM	Bubbler valve closed
6/17/2011	1:41:33 PM	Helium valve opened
6/17/2011	1:41:33 PM	Main Vac valve opened
6/17/2011	1:41:33 PM	Bypass valve opened
6/17/2011	1:41:33 PM	Helium MFC set to  100.000000
6/17/2011	1:41:33 PM	H2 MFC set to  0.000000
6/17/2011	1:41:33 PM	BCl3 MFC set to  0.000000
6/17/2011	1:41:33 PM	PHl3 MFC set to  0.000000
6/17/2011	1:41:33 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:41:33 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:41:33 PM	Tube furnace set to 0
6/17/2011	1:42:33 PM	Helium valve closed
6/17/2011	1:42:33 PM	H2 valve closed
6/17/2011	1:42:33 PM	BCl3 valve closed
6/17/2011	1:42:33 PM	PH3 valve closed
6/17/2011	1:42:33 PM	SiCl4 pre valve closed
6/17/2011	1:42:33 PM	SiCl4 post valve closed
6/17/2011	1:42:33 PM	Bubbler valve closed
6/17/2011	1:42:33 PM	Main Vac valve opened
6/17/2011	1:42:33 PM	Bypass valve opened
6/17/2011	1:42:33 PM	Helium MFC set to  0.000000
6/17/2011	1:42:33 PM	H2 MFC set to  0.000000
6/17/2011	1:42:33 PM	BCl3 MFC set to  0.000000
6/17/2011	1:42:33 PM	PHl3 MFC set to  0.000000
6/17/2011	1:42:33 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:42:33 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:42:34 PM	Tube furnace set to 0
6/17/2011	1:43:34 PM	H2 valve closed
6/17/2011	1:43:34 PM	BCl3 valve closed
6/17/2011	1:43:34 PM	PH3 valve closed
6/17/2011	1:43:34 PM	SiCl4 pre valve closed
6/17/2011	1:43:34 PM	SiCl4 post valve closed
6/17/2011	1:43:34 PM	Bubbler valve closed
6/17/2011	1:43:34 PM	Helium valve opened
6/17/2011	1:43:34 PM	Main Vac valve opened
6/17/2011	1:43:34 PM	Bypass valve opened
6/17/2011	1:43:34 PM	Helium MFC set to  100.000000
6/17/2011	1:43:34 PM	H2 MFC set to  0.000000
6/17/2011	1:43:34 PM	BCl3 MFC set to  0.000000
6/17/2011	1:43:34 PM	PHl3 MFC set to  0.000000
6/17/2011	1:43:34 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:43:34 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:43:34 PM	Tube furnace set to 0
6/17/2011	1:44:34 PM	Helium valve closed
6/17/2011	1:44:34 PM	H2 valve closed
6/17/2011	1:44:34 PM	BCl3 valve closed
6/17/2011	1:44:34 PM	PH3 valve closed
6/17/2011	1:44:34 PM	SiCl4 pre valve closed
6/17/2011	1:44:34 PM	SiCl4 post valve closed
6/17/2011	1:44:34 PM	Bubbler valve closed
6/17/2011	1:44:34 PM	Main Vac valve opened
6/17/2011	1:44:34 PM	Bypass valve opened
6/17/2011	1:44:34 PM	Helium MFC set to  0.000000
6/17/2011	1:44:34 PM	H2 MFC set to  0.000000
6/17/2011	1:44:34 PM	BCl3 MFC set to  0.000000
6/17/2011	1:44:34 PM	PHl3 MFC set to  0.000000
6/17/2011	1:44:34 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:44:34 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:44:34 PM	Tube furnace set to 0
6/17/2011	1:45:34 PM	H2 valve closed
6/17/2011	1:45:34 PM	BCl3 valve closed
6/17/2011	1:45:34 PM	PH3 valve closed
6/17/2011	1:45:34 PM	SiCl4 pre valve closed
6/17/2011	1:45:34 PM	SiCl4 post valve closed
6/17/2011	1:45:34 PM	Bubbler valve closed
6/17/2011	1:45:34 PM	Helium valve opened
6/17/2011	1:45:34 PM	Main Vac valve opened
6/17/2011	1:45:34 PM	Bypass valve opened
6/17/2011	1:45:34 PM	Helium MFC set to  100.000000
6/17/2011	1:45:34 PM	H2 MFC set to  0.000000
6/17/2011	1:45:34 PM	BCl3 MFC set to  0.000000
6/17/2011	1:45:34 PM	PHl3 MFC set to  0.000000
6/17/2011	1:45:34 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:45:34 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:45:34 PM	Tube furnace set to 0
6/17/2011	1:46:34 PM	Helium valve closed
6/17/2011	1:46:34 PM	H2 valve closed
6/17/2011	1:46:34 PM	BCl3 valve closed
6/17/2011	1:46:34 PM	PH3 valve closed
6/17/2011	1:46:34 PM	SiCl4 pre valve closed
6/17/2011	1:46:34 PM	SiCl4 post valve closed
6/17/2011	1:46:34 PM	Bubbler valve closed
6/17/2011	1:46:34 PM	Main Vac valve opened
6/17/2011	1:46:34 PM	Bypass valve opened
6/17/2011	1:46:34 PM	Helium MFC set to  0.000000
6/17/2011	1:46:34 PM	H2 MFC set to  0.000000
6/17/2011	1:46:34 PM	BCl3 MFC set to  0.000000
6/17/2011	1:46:34 PM	PHl3 MFC set to  0.000000
6/17/2011	1:46:34 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:46:34 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:46:34 PM	Tube furnace set to 0
6/17/2011	1:46:35 PM	Run finished at 1:46 PM
6/17/2011	1:46:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
6/17/2011	1:56:57 PM	Main Vac valve closed
6/17/2011	1:56:59 PM	Bypass valve closed
6/17/2011	1:57:19 PM	Bypass valve opened
6/17/2011	1:57:20 PM	Main Vac valve opened
6/17/2011	1:57:25 PM	Helium MFC set to  50.000000
6/17/2011	1:57:26 PM	Helium valve opened
6/17/2011	1:58:38 PM	Helium valve closed
6/17/2011	1:58:41 PM	Helium MFC set to  0.000000
6/17/2011	1:59:27 PM	Recipe started at 1:59 PM
6/17/2011	1:59:27 PM	Helium valve closed
6/17/2011	1:59:27 PM	BCl3 valve closed
6/17/2011	1:59:27 PM	PH3 valve closed
6/17/2011	1:59:27 PM	SiCl4 pre valve closed
6/17/2011	1:59:27 PM	SiCl4 post valve closed
6/17/2011	1:59:27 PM	Main Vac valve closed
6/17/2011	1:59:27 PM	Bypass valve closed
6/17/2011	1:59:27 PM	Bubbler valve closed
6/17/2011	1:59:27 PM	H2 valve opened
6/17/2011	1:59:27 PM	Helium MFC set to  0.000000
6/17/2011	1:59:27 PM	H2 MFC set to  500.000000
6/17/2011	1:59:27 PM	BCl3 MFC set to  0.000000
6/17/2011	1:59:27 PM	PHl3 MFC set to  0.000000
6/17/2011	1:59:27 PM	SiCl4 MFC set to  0.000000
6/17/2011	1:59:27 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	1:59:27 PM	Tube furnace set to 200
6/17/2011	2:00:48 PM	Helium valve closed
6/17/2011	2:00:48 PM	BCl3 valve closed
6/17/2011	2:00:48 PM	PH3 valve closed
6/17/2011	2:00:48 PM	SiCl4 pre valve closed
6/17/2011	2:00:48 PM	SiCl4 post valve closed
6/17/2011	2:00:48 PM	Main Vac valve closed
6/17/2011	2:00:48 PM	Bypass valve closed
6/17/2011	2:00:48 PM	H2 valve opened
6/17/2011	2:00:48 PM	Bubbler valve opened
6/17/2011	2:00:48 PM	Helium MFC set to  0.000000
6/17/2011	2:00:48 PM	H2 MFC set to  400.000000
6/17/2011	2:00:48 PM	BCl3 MFC set to  0.000000
6/17/2011	2:00:48 PM	PHl3 MFC set to  0.000000
6/17/2011	2:00:48 PM	SiCl4 MFC set to  0.000000
6/17/2011	2:00:48 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	2:00:48 PM	Tube furnace set to 1000
6/17/2011	2:20:48 PM	Helium valve closed
6/17/2011	2:20:48 PM	BCl3 valve closed
6/17/2011	2:20:48 PM	PH3 valve closed
6/17/2011	2:20:48 PM	SiCl4 pre valve closed
6/17/2011	2:20:48 PM	SiCl4 post valve closed
6/17/2011	2:20:48 PM	Main Vac valve closed
6/17/2011	2:20:48 PM	Bypass valve closed
6/17/2011	2:20:48 PM	H2 valve opened
6/17/2011	2:20:48 PM	Bubbler valve opened
6/17/2011	2:20:48 PM	Helium MFC set to  0.000000
6/17/2011	2:20:48 PM	H2 MFC set to  500.000000
6/17/2011	2:20:48 PM	BCl3 MFC set to  0.000000
6/17/2011	2:20:48 PM	PHl3 MFC set to  0.000000
6/17/2011	2:20:48 PM	SiCl4 MFC set to  0.000000
6/17/2011	2:20:48 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	2:20:48 PM	Tube furnace set to 1000
6/17/2011	2:40:48 PM	H2 valve closed
6/17/2011	2:40:48 PM	BCl3 valve closed
6/17/2011	2:40:48 PM	PH3 valve closed
6/17/2011	2:40:48 PM	SiCl4 pre valve closed
6/17/2011	2:40:48 PM	SiCl4 post valve closed
6/17/2011	2:40:48 PM	Main Vac valve closed
6/17/2011	2:40:48 PM	Bypass valve closed
6/17/2011	2:40:48 PM	Helium valve opened
6/17/2011	2:40:48 PM	Bubbler valve opened
6/17/2011	2:40:48 PM	Helium MFC set to  500.000000
6/17/2011	2:40:48 PM	H2 MFC set to  0.000000
6/17/2011	2:40:48 PM	BCl3 MFC set to  0.000000
6/17/2011	2:40:48 PM	PHl3 MFC set to  0.000000
6/17/2011	2:40:48 PM	SiCl4 MFC set to  0.000000
6/17/2011	2:40:48 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	2:40:48 PM	Tube furnace set to 0
6/17/2011	3:00:48 PM	Helium valve closed
6/17/2011	3:00:48 PM	H2 valve closed
6/17/2011	3:00:48 PM	BCl3 valve closed
6/17/2011	3:00:48 PM	PH3 valve closed
6/17/2011	3:00:48 PM	SiCl4 pre valve closed
6/17/2011	3:00:48 PM	SiCl4 post valve closed
6/17/2011	3:00:48 PM	Main Vac valve closed
6/17/2011	3:00:48 PM	Bypass valve closed
6/17/2011	3:00:48 PM	Bubbler valve closed
6/17/2011	3:00:48 PM	Helium MFC set to  0.000000
6/17/2011	3:00:48 PM	H2 MFC set to  0.000000
6/17/2011	3:00:48 PM	BCl3 MFC set to  0.000000
6/17/2011	3:00:48 PM	PHl3 MFC set to  0.000000
6/17/2011	3:00:48 PM	SiCl4 MFC set to  0.000000
6/17/2011	3:00:48 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	3:00:49 PM	Tube furnace set to 0
6/17/2011	3:00:49 PM	Helium valve closed
6/17/2011	3:00:49 PM	H2 valve closed
6/17/2011	3:00:49 PM	BCl3 valve closed
6/17/2011	3:00:49 PM	PH3 valve closed
6/17/2011	3:00:49 PM	SiCl4 pre valve closed
6/17/2011	3:00:49 PM	SiCl4 post valve closed
6/17/2011	3:00:49 PM	Main Vac valve closed
6/17/2011	3:00:49 PM	Bypass valve closed
6/17/2011	3:00:49 PM	Bubbler valve closed
6/17/2011	3:00:49 PM	Helium MFC set to  0.000000
6/17/2011	3:00:49 PM	H2 MFC set to  0.000000
6/17/2011	3:00:49 PM	BCl3 MFC set to  0.000000
6/17/2011	3:00:49 PM	PHl3 MFC set to  0.000000
6/17/2011	3:00:49 PM	SiCl4 MFC set to  0.000000
6/17/2011	3:00:49 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	3:00:49 PM	Tube furnace set to 0
6/17/2011	3:20:49 PM	Run finished at 3:20 PM
6/17/2011	4:10:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2011	4:10:58 PM	Recipe started at 4:10 PM
6/17/2011	4:10:58 PM	H2 valve closed
6/17/2011	4:10:58 PM	BCl3 valve closed
6/17/2011	4:10:58 PM	PH3 valve closed
6/17/2011	4:10:58 PM	SiCl4 pre valve closed
6/17/2011	4:10:58 PM	SiCl4 post valve closed
6/17/2011	4:10:58 PM	Main Vac valve closed
6/17/2011	4:10:58 PM	Bypass valve closed
6/17/2011	4:10:58 PM	Bubbler valve closed
6/17/2011	4:10:58 PM	Helium valve opened
6/17/2011	4:10:58 PM	Helium MFC set to  500.000000
6/17/2011	4:10:58 PM	H2 MFC set to  0.000000
6/17/2011	4:10:58 PM	BCl3 MFC set to  0.000000
6/17/2011	4:10:58 PM	PHl3 MFC set to  0.000000
6/17/2011	4:10:58 PM	SiCl4 MFC set to  0.000000
6/17/2011	4:10:58 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	4:10:58 PM	Tube furnace set to 0
6/17/2011	4:11:02 PM	Helium valve closed
6/17/2011	4:11:02 PM	H2 valve closed
6/17/2011	4:11:02 PM	BCl3 valve closed
6/17/2011	4:11:02 PM	PH3 valve closed
6/17/2011	4:11:02 PM	SiCl4 pre valve closed
6/17/2011	4:11:02 PM	SiCl4 post valve closed
6/17/2011	4:11:03 PM	Main Vac valve closed
6/17/2011	4:11:03 PM	Bypass valve closed
6/17/2011	4:11:03 PM	Bubbler valve closed
6/17/2011	4:11:03 PM	Helium MFC set to  0.000000
6/17/2011	4:11:03 PM	H2 MFC set to  0.000000
6/17/2011	4:11:03 PM	BCl3 MFC set to  0.000000
6/17/2011	4:11:03 PM	PHl3 MFC set to  0.000000
6/17/2011	4:11:03 PM	SiCl4 MFC set to  0.000000
6/17/2011	4:11:03 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	4:11:03 PM	Tube furnace set to 0
6/17/2011	4:11:03 PM	Run finished at 4:11 PM
6/17/2011	4:11:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/17/2011	4:33:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/17/2011	4:33:40 PM	Recipe started at 4:33 PM
6/17/2011	4:33:40 PM	Helium valve closed
6/17/2011	4:33:40 PM	H2 valve closed
6/17/2011	4:33:40 PM	BCl3 valve closed
6/17/2011	4:33:40 PM	PH3 valve closed
6/17/2011	4:33:40 PM	SiCl4 pre valve closed
6/17/2011	4:33:40 PM	SiCl4 post valve closed
6/17/2011	4:33:40 PM	Main Vac valve closed
6/17/2011	4:33:40 PM	Bubbler valve closed
6/17/2011	4:33:40 PM	Bypass valve opened
6/17/2011	4:33:40 PM	Helium MFC set to  0.000000
6/17/2011	4:33:40 PM	H2 MFC set to  0.000000
6/17/2011	4:33:40 PM	BCl3 MFC set to  0.000000
6/17/2011	4:33:40 PM	PHl3 MFC set to  0.000000
6/17/2011	4:33:40 PM	SiCl4 MFC set to  0.000000
6/17/2011	4:33:40 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	4:33:41 PM	Tube furnace set to 0
6/17/2011	4:34:11 PM	Helium valve closed
6/17/2011	4:34:11 PM	H2 valve closed
6/17/2011	4:34:11 PM	BCl3 valve closed
6/17/2011	4:34:11 PM	PH3 valve closed
6/17/2011	4:34:11 PM	SiCl4 pre valve closed
6/17/2011	4:34:11 PM	SiCl4 post valve closed
6/17/2011	4:34:11 PM	Bubbler valve closed
6/17/2011	4:34:11 PM	Main Vac valve opened
6/17/2011	4:34:11 PM	Bypass valve opened
6/17/2011	4:34:11 PM	Helium MFC set to  0.000000
6/17/2011	4:34:11 PM	H2 MFC set to  0.000000
6/17/2011	4:34:11 PM	BCl3 MFC set to  0.000000
6/17/2011	4:34:11 PM	PHl3 MFC set to  0.000000
6/17/2011	4:34:11 PM	SiCl4 MFC set to  0.000000
6/17/2011	4:34:11 PM	Bypass solenoid MFC set to  0.000000
6/17/2011	4:34:11 PM	Tube furnace set to 0
6/17/2011	4:34:12 PM	Run finished at 4:34 PM
6/17/2011	4:34:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
